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Airborne Molecular contaminants (AMC) in
cleanroom air or gases have been an essential part of semiconductor
fabrication process control. Most of
the airborne contaminant come from the process chemicals, outside air,
cleanroom material and process tools.
Airborne contaminants can lead to: reduce
yields, shorten tools life; process related problems such as corrosion of
process wafers and circuit boards, hazing, delamination and uncontrolled
doping; and to reduce long term device reliability, short, leaks and
electrical fault What
are AMCs ? Molecular Acids (MA) are comprised primarily of hydrofluoric
acid, hydrochloric acid, sulfuric acid, phosphoric acid, and nitric acid. Molecular bases includes ammonia, amines and amides; Molecular Condensables (MC) are Organic compounds (hydrocarbon) have
boiling points typically greater than 150 °C above room temperature at
atmospheric pressure, capable of condensation on a clean surface Molecular Dopants (MD) include Boron, Phosphorus, Arsenic, and
Antimony in volatile form Molecular
Metals (MM) are
organo-metallic compounds in particulates or molecules form that present in
cleanroom air. SEMI
F21-1102 standard “Classification of Airborne Molecular Contaminant Level in
Clean Environment In recognition of growing concern about AMC
effects, Semiconductor Equipment and Materials Institute (SEMI) issued the
F21-1102 standard “Classification of Airborne Molecular Contaminant Level in
Clean Environment “ which specified five class of AMC - 1)
Molecular Acid
(MA) 2)
Molecular Base
(MB) 3)
Molecular
Condensable (MC, Organics) 4)
Molecular
Dopant (MD) 5)
Molecular Metal
(MM)
Excel
Green Tech - Airborne Molecular Contaminants Monitoring Service: Airborne Molecular
Contaminants (AMC) Testing
requires “specific technical know-how” both in cleanroom laboratory analysis in
order to meet reliable test results in specific cleanroom industry. Excel Green Tech Sdn offers a complete air
analysis services in accordance with SEMI
F21-1102 and other stringent specification by cleanroom filter manufacturer
of these Airborne Molecular Contaminants. Our AMC monitoring personnel and technical specialist has
extensive experience in serving major wafer fabs, semiconductor and
microelectronic company as well as cleanroom filter suppliers. The team is a highly specialized group, which
has unique capability with specialized instrumentation of providing cleanroom
airborne contamination consultation, on-site testing, laboratory analysis,
result interpretation, and recommendations for your cleanroom environment. Benefits of Controlling Airborne Molecular
Contaminants in Cleanroom include: a) Improve yield and
process control; b) Improve electrical
and mechanical properties; c) Improve product
reliability and lifetime d) Optimized
production performance; e) As baseline information
to allow engineer to set rational and cost-effective specifications; f)
Allow prompt respond to recover process and detect source of
contamination; Reduce
EHS concern if AMC is controlled to process (in ppb) level and meet
regulatory (ppm) level |